MATEC Web of Conferences
Volume 54, 20162016 7th International Conference on Mechanical, Industrial, and Manufacturing Technologies (MIMT 2016)
|Number of page(s)||5|
|Section||Electronic application technology|
|Published online||22 April 2016|
Non-initial overlap bulk silicon comb-drive actuator with low-voltage and large-displacement
1 College of internet of things engineering, Hohai University, 213022 Changzhou, China
2 Key Laboratory of MEMS of the Ministry of Education, Southeast University, 210096 Nanjing, China
Two different kinds of bulk-Si comb-drive actuators are designed in this work: initial overlap comb-drive actuator and non-initial overlap comb-drive actuator. They are fabricated by a simple post-CMOS bulk micromachining process. A cascade folded beam is designed to achieve large displacement at low driving voltages. And non-initial overlap and unequal wide comb fingers are used to reduce the side instability and improve the pull-in voltage. The measurement results show that the non-initial overlap comb-drive actuator improves the pull-in voltage by 73.3% than the initial overlap comb-drive actuator, and the maximum displacement of the non-initial overlap actuator is larger by 78.9% than that of the initial overlap actuator.
© Owned by the authors, published by EDP Sciences, 2016
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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