| Issue |
MATEC Web of Conferences
Volume 32, 2015
International Symposium of Optomechatronics Technology (ISOT 2015)
|
|
|---|---|---|
| Article Number | 03001 | |
| Number of page(s) | 6 | |
| Section | Fabrication and processing | |
| DOI | https://doi.org/10.1051/matecconf/20153203001 | |
| Published online | 02 December 2015 | |
Processing of Graphene combining Optical Detection and Scanning Probe Lithography
Division Microrobotics and Control Engineering, University of Oldenburg, D-26129 Oldenburg, Germany
a Corresponding author: soeren.zimmermann@uni-oldenburg.de
This paper presents an experimental setup tailored for robotic processing of graphene with in-situ vision based control. A robust graphene detection approach is presented applying multiple image processing operations of the visual feedback provided by a high-resolution light microscope. Detected graphene flakes can be modified using a scanning probe based lithographical process that is directly linked to the in-situ optical images. The results of this process are discussed with respect to further application scenarios.
© Owned by the authors, published by EDP Sciences, 2015
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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