MATEC Web of Conferences
Volume 12, 2014FDMD II - JIP 2014 - Fatigue Design & Material Defects
|Number of page(s)||3|
|Section||Poster Session 4A: Fatigue and Defects|
|Published online||09 June 2014|
Analytical modeling of mechanical behavior of structures: Comparative analysis, experimental validation and numerical correction with FEM of material defects generated by anisotropic etching
1 Physics department, University of Blida, 09000 Blida, Algeria
2 Femto-st Institute, University of Franche Comté, 25000 Besancon, France
3 NanomedecineLab, University of Franche Comté, 25000 Besancon, France
a Corresponding author: email@example.com
This paper presented semi-analytical approach in order to investigate the influence of manufacturing process defects on the elasticity of thin microbeam. The Rayleigh Beam Model (RBM) will be analyzed and corrected using 3D FEM scripts including the effects of the cross-section shape and the under-etching. This model was tested on measurements of thin chromium microbeam of dimensions (80 × 2 × 0.95 μm3). The results show that the influence of defects is very significant for the extracted value of Young's modulus where it is very close to the measured value and it is about 279.1 GPa.
© Owned by the authors, published by EDP Sciences, 2014
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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