MATEC Web of Conferences
Volume 1, 2012CSNDD 2012 – International Conference on Structural Nonlinear Dynamics and Diagnosis
|Number of page(s)||4|
|Section||Nonlinear Dynamics of MEMS/NEMS/AFM|
|Published online||09 July 2012|
Nonlinear Dynamical analysis of an AFM tapping mode microcantilever beam
1 Micro Electro Thermal Systems Research Unit, National Engineering School of Sfax, University of Sfax, BP 3038, Sfax, Tunisia
2 Applied Mechanics and Systems Res. Lab, Tunisia Polytechnic School, University of Carthage, BP 743 La Marsa 2078, Tunisia
3 Dept. of Engineering Science and Mechanics, BMC 0219, Virginia Tech, Blacksburg, Virginia 24061, USA
a e-mail: email@example.com
We focus in this paper on the modeling and dynamical analysis of a tapping mode atomic force microscopy (AFM) microcantilever beam. This latter is subjected to a harmonic excitation of its base displacement and to Van der Waals and DMT contact forces at its free end. For AFM design purposes, we derive a mathematical model for accurate description of the AFM microbeam dynamics. We solve the resulting equations of motions and associated boundary conditions using the Galerkin method. We find that using one-mode approximation in tapping mode operating in the neighborhood of the contact region one-mode approximation may lead to erroneous results.
© Owned by the authors, published by EDP Sciences, 2012
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