Open Access
MATEC Web Conf.
Volume 63, 2016
2016 International Conference on Mechatronics, Manufacturing and Materials Engineering (MMME 2016)
Article Number 05030
Number of page(s) 8
Section Computer Engineering and Applications
Published online 12 July 2016
  1. Lee, H. Ko, et al., “Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope”, Microelectronics J., vol. 39, 2008, pp. 1–6. [CrossRef]
  2. M.S. Weinberg and A. Kourepenis, “Error sources in in-plane silicon tuning-fork MEMS gyroscopes”, J. Microelectromech. Syst., vol. 15, 2006, pp. 479–491. [CrossRef]
  3. AcarA.M. Shkel, “Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement”, J. Micromech. Microeng., 2005, 15 1092–1101. [CrossRef]
  4. J. Cui, Z. Y. Guo, Z.C. Yang, et al., “Electrical coupling suppressing for a microgyroscope using ascending frequency drive with 2-DOF PID controller”, Proc. Transducers 2011, pp.2002–2005.
  5. J. Cui, Z.Y. Guo, Z.C. Yang, et al., “Electrical coupling suppression and transient response improvement for a microgyroscope using ascending frequency drive with a 2-DOF PID controller”, J. Micromech. Microeng., 2011, 21 095020. [CrossRef]
  6. S. Sonmezoglu, S.E. Alper, T. Akin, “An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth”, J. Microelectromech. Syst., Vol. 23, No. 2, 2014, pp.284–297. [CrossRef]
  7. R. Mirjalili, H. Wen, D. E. Serrano, and F. Ayazi, “Substrate-decoupled silicon disk resonant having degenerate gyroscopicmodes with Qin excess of 1-million”, Proc. TRANSDUCERS 2015, pp. 15–18.
  8. C. H. He, Q. C. Zhao, Y.X. Liu, et al., “Closed loop control design for the sense mode of micromachined vibratory gyroscopes”, Sci. China Tech. Sci. 2013, Vol. 56, pp. 1112–1118. [CrossRef]
  9. C.H. He, D.C. Liu, Q.C. Zhao, et al., “Anovel narrow-band force rebalance control method for the sense mode of MEMS vibratory gyroscopes”, Measurement, vol. 62, 2015, pp. 197–204. [CrossRef]