MATEC Web of Conferences

Influence of deposition conditions on structure parameters and mechanical properties of multi-element coatings based on niobium nitride

Vladimir Tabakov, Aleksey Chikhranov and Yana Dolzhenko

MATEC Web Conf., 298 (2019) 00085

Published online: 18 November 2019

DOI: 10.1051/matecconf/201929800085

Vladimir Tabakov

Aleksey Chikhranov

Yana Dolzhenko

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