MATEC Web of Conferences

Proximity Effect Aware Detailed Placement in Electron Beam Lithography

Yuhang Chen, Zhipeng Huang, Xiongfeng Chen, Jianli Chen and Wenxing Zhu

MATEC Web Conf., 232 (2018) 04046

Published online: 19 November 2018

DOI: 10.1051/matecconf/201823204046

Yuhang Chen

Zhipeng Huang

Xiongfeng Chen

Jianli Chen

Wenxing Zhu

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)