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Sequential Processes to Produce N-TiO₂ Films Through Rf Plasmas

R Valencia-Alvarado, A de la Piedad-Beneitez, R López-Callejas, B G Rodríguez-Méndez, A Mercado-Cabrera, R Peña-Eguiluz, A E Muñoz-Castro and J M de la Rosa-Vázquez

MATEC Web Conf., 67 (2016) 06075

Published online: 29 July 2016

DOI: 10.1051/matecconf/20166706075

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