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Growth of AlGaN Film on Si (111) Substrate

Yang Zhang, Bingzhen Chen, Na Peng, Lu Zhang, Cuibai Yang, Xu Pan, Shun Yao and Zhiyong Wang

MATEC Web of Conferences, 61 (2016) 06016

Published online: 28 June 2016

DOI: 10.1051/matecconf/20166106016

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