MATEC Web of Conferences

3D electrostatic actuator fabricated by non-ablative femtosecond laser exposure and chemical etching

Tao Yang and Yves Bellouard

MATEC Web of Conferences, 32 (2015) 02003

Published online: 02 December 2015

DOI: 10.1051/matecconf/20153202003

Tao Yang

Yves Bellouard

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)