MATEC Web of Conferences

Modeling, simulation and experimental research for MEMS cantilevers of complex geometry

Adriana Sandu, Lucian Bogatu, Georgeta Ionascu, Elena Manea and Viorel Gheorghe

MATEC Web Conf., 290 (2019) 08002

Published online: 21 August 2019

DOI: 10.1051/matecconf/201929008002

Adriana Sandu

Lucian Bogatu

Georgeta Ionascu

Elena Manea

Viorel Gheorghe

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