MATEC Web of Conferences

Reactive Ion Etching Process of Micro Mechanical Pendulum

Wei Zhang, Xiaoyan Duan, Jin Qiao and Ping Yue

MATEC Web Conf., 95 (2017) 07024

Published online: 09 February 2017

DOI: 10.1051/matecconf/20179507024

Wei Zhang

Xiaoyan Duan

Jin Qiao

Ping Yue

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