MATEC Web of Conferences

Measurements of the contact angle of Noa81 photoresist for different temperatures

Ekaterina O. Kirichenko and Elizaveta Ya. Gatapova

MATEC Web Conf., 92 (2017) 01042

Published online: 21 December 2016

DOI: 10.1051/matecconf/20179201042

Ekaterina O. Kirichenko

Elizaveta Ya. Gatapova

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