MATEC Web of Conferences

Humidity influence on the adhesion of SU-8 polymer from MEMS applications

Corina Birleanu, Marius Pustan, Rodica Voicu, Florina Serdean and Violeta Merie

MATEC Web Conf., 137 (2017) 08002

Published online: 22 November 2017

DOI: 10.1051/matecconf/201713708002

Corina Birleanu

Marius Pustan

Rodica Voicu

Florina Serdean

Violeta Merie

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