MATEC Web of Conferences

Generating multi-component multi-layer coatings type mecraly using multi-cathode magnetron sputtering systems

Valery Kolesnik, Yury Rubanov and Yulia Tokach

MATEC Web Conf., 129 (2017) 02007

Published online: 07 November 2017

DOI: 10.1051/matecconf/201712902007

Valery Kolesnik

Yury Rubanov

Yulia Tokach

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