MATEC Web of Conferences

Development of a XYθ_z 3-DOF nanopositioning stage with linear displacement amplification device

Chih-Liang Chu, Hung-Chi Chen and Ming-Han Sie

MATEC Web Conf., 123 (2017) 00006

Published online: 21 September 2017

DOI: 10.1051/matecconf/201712300006

Chih-Liang Chu

Hung-Chi Chen

Ming-Han Sie

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