MATEC Web of Conferences

Combined Ultrasonic Elliptical Vibration and Chemical Mechanical Polishing of Monocrystalline Silicon

Defu Liu, Tao Chen and Riming Yan

MATEC Web Conf., 82 (2016) 02001

Published online: 31 October 2016

DOI: 10.1051/matecconf/20168202001

Defu Liu

Tao Chen

Riming Yan

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