MATEC Web of Conferences

Influence of Optimization of Process Parameters on Threshold Voltage for Development of HfO₂/TiSi₂ 18 nm PMOS

N. Atan, Ibrahim Ahmad, B.Y. Majlis and M.F Azle

MATEC Web Conf., 78 (2016) 01019

Published online: 07 October 2016

DOI: 10.1051/matecconf/20167801019

N. Atan

Ibrahim Ahmad

B.Y. Majlis

M.F Azle

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