MATEC Web of Conferences

Research on the Shape Precison of the Micro-groove in the Silicon under Diamond Fly-cutting

Yanyan Yan, Chengyun Yang and Runxing Wang

MATEC Web Conf., 67 (2016) 03023

Published online: 29 July 2016

DOI: 10.1051/matecconf/20166703023

Yanyan Yan

Chengyun Yang

Runxing Wang

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