MATEC Web of Conferences

Non-initial overlap bulk silicon comb-drive actuator with low-voltage and large-displacement

Chunhua Cai, Di Hua and Ming Qin

MATEC Web of Conferences, 54 (2016) 12003

Published online: 22 April 2016

DOI: 10.1051/matecconf/20165412003

Chunhua Cai

Di Hua

Ming Qin

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