MATEC Web of Conferences

Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)

Z.X. Chen, X. Li, W.-M. Li and G.-Q. Lo

MATEC Web of Conferences, 39 (2016) 01010

Published online: 13 January 2016

DOI: 10.1051/matecconf/20163901010

Z.X. Chen

X. Li

W.-M. Li

G.-Q. Lo

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