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Cited article:

Improvement of Field Effect Capacity Type Gas Sensor Thermo Inertial Parameters by Using Laser Micromilling Technique

Nikolay Samotaev, Konstantin Oblov, Maya Etrekova, Denis Veselov, Anastasia Ivanova and Artur Litvinov
Materials Science Forum 977 256 (2020)
https://doi.org/10.4028/www.scientific.net/MSF.977.256

Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

Nikolay Samotaev, Konstantin Oblov, Maya Etrekova, Denis Veselov and Anastasiya Gorshkova
Materials Science Forum 977 238 (2020)
https://doi.org/10.4028/www.scientific.net/MSF.977.238

Ceramic packages prototyping for electronic components by using laser micromilling technology

Nikolay N. Samotaev, Konstantin Yu Oblov, Anastasia V. Gorshkova, Anastasia V. Ivanova and Dmitriy V. Philipchuk
Journal of Physics: Conference Series 1686 (1) 012010 (2020)
https://doi.org/10.1088/1742-6596/1686/1/012010

Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices

K. Yu. Oblov, N. N. Samotaev, M. O. Etrekova and A. V. Gorshkova
Physics of Atomic Nuclei 82 (11) 1508 (2019)
https://doi.org/10.1134/S1063778819110152