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Cited article:

Development of a XYθ_z 3-DOF nanopositioning stage with linear displacement amplification device

Chih-Liang Chu, Hung-Chi Chen, Ming-Han Sie

MATEC Web Conf., 123 (2017) 00006

Published online: 2017-09-21

DOI: https://doi.org/10.1051/matecconf/201712300006

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Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

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