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Cited article:

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Yalin Wang, Yongjun Yang, X. Lei, S.P. Kozaitis and C.-C. Ku
MATEC Web of Conferences 160 05008 (2018)
https://doi.org/10.1051/matecconf/201816005008