Open Access
Issue |
MATEC Web Conf.
Volume 143, 2018
IV International Young Researchers Conference “Youth, Science, Solutions: Ideas and Prospects” (YSSIP-2017)
|
|
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Article Number | 03008 | |
Number of page(s) | 7 | |
Section | Materials Science | |
DOI | https://doi.org/10.1051/matecconf/201814303008 | |
Published online | 08 January 2018 |
- J.J. Rocca, J.D. Meyer, M.R. Farrell, G.J. Collins, J. Appl. Phys., 56, 790 (1984) [CrossRef] [Google Scholar]
- D.R. Borisa, T.B. Petrova, G.M. Petrov, S.G. Walton, J. Vac. Sci. Technol., A 35, 01A104 (2017) [CrossRef] [Google Scholar]
- S. Walton, D. Leonhardt, D. Murphy, R. Meger, R. Fernsler, Bull. Am. Phys. Soc., 44, 8, 58 (1999) [Google Scholar]
- D. Leonhardt, C. Muratore, S.G. Walton, IEEE Trans. on Plasma Science, 33, 2, 783 (2005) [CrossRef] [Google Scholar]
- T.M. Vasilieva, Journal of Physics: Conference Series, 370, 012012 (2012) [CrossRef] [Google Scholar]
- A. Agarwal, M.J. Kushner, J. Vac. Sci. Technol., A 27, 37 (2009) [CrossRef] [Google Scholar]
- S.G. Walton, D.R. Boris, S.C. Hernández, E.H. Lock, Tz.B. Petrova, G.M. Petrov, R.F. Fernsler, J. Solid State Sci. Technol., 4(6), 5033-5040 (2015) [CrossRef] [Google Scholar]
- I. Alexeff, R.V. Neidigh, et all., Phys. Rev. Letters, 10(7), 273-276 (1963) [CrossRef] [Google Scholar]
- W.D. Getty, L.D. Smullin, J. Appl. Phys., 34, 3421 (1963) [CrossRef] [Google Scholar]
- E.G. Shustin, N.V. Isaev, M.P. Temiryazeva, Yu.V. Fedorov, Vacuum 83, 1350-1354 (2009) [CrossRef] [Google Scholar]
- R.F. Fernsler, W.M. Manheimer, R.A. Meger, J. Mathew, D.P. Murphy, R.E. Pechacek, J.A. Gregorc, Physics of Plasmas, 5(5), 2137 (1998) [CrossRef] [Google Scholar]
- I.V. Melnik, Radioelectronics and communication systems, 56(12), 51–61 (2013) [Google Scholar]
- G.P. Berezina, V.S. Us, Plasma Physics Reports, 37(13), 1156–1161 (2011) [CrossRef] [Google Scholar]
- W.M. Manheimer, R.F. Fernsler, M. Lampe, R.A. Meger, Plasma Sources Sci. Technol., 9, 370 (2000) [CrossRef] [Google Scholar]
- S.G. Walton, C. Muratore, D. Leonhardt, R.F. Fernsler, D.D. Blackwell, R.A. Meger, Surf. Coat. Technol., 186(1-2), 40 (2004) [CrossRef] [Google Scholar]
- V.A. Burdovitsin, Y.A. Burachevskii, E.M. Oks, M.V. Fedorov, Instrum. Exp. Tech., 46, 257 (2003) [CrossRef] [Google Scholar]
- V.A. Burdovitsin, E.M. Oks, M.V. Fedorov, Russ. Phys. J., 47, 310-314 (2004) [CrossRef] [Google Scholar]
- A.S. Klimov, M.I. Lomaev, E.M. Oks, A.P. Andreichik, Tech. Phys., 62, 218 (2017) [CrossRef] [Google Scholar]
- R.A. Meger et al., Physics of plasmas, 8(5), 2558 (2001) [CrossRef] [Google Scholar]
- E.G. Shustin, N.V. Isaev, I.L. Klykov, V.V. Peskov, Vacuum, 85, 711 (2011) [CrossRef] [Google Scholar]
- F.F. Chen, Electric Probes, in Plasma Diagnostic Techniques, Chapter 4, 113-200 (Academic Press, New York, 1965) [Google Scholar]
- Y. Nakamura, M. J. Kurachi, Phys. D, 21(5), 718 (1988) [CrossRef] [Google Scholar]
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