Open Access
MATEC Web Conf.
Volume 67, 2016
International Symposium on Materials Application and Engineering (SMAE 2016)
Article Number 04015
Number of page(s) 6
Section Chapter 4 Surface Engineering and Coating Technology
Published online 29 July 2016
  1. J. Musil, J. Vlcek, A perspective of magnetron sputtering in surface engineering, Surf. Coat. Technol. 112 (1999) 162–169. [CrossRef]
  2. G.H. Song, H. Du, C.L. He: Hard and Superhard Coatings, Beijing, Chemical Industry Press, 2007.
  3. S. Veprek, S. Reiprich, L. Shizhi, Superhard nanocrystalline composite materials: The TiN/Si3N4 system, Appl. Phys. Lett. 66 (1995) 2640–2642. [CrossRef]
  4. S. Veprek, P. Nesladek, A. Niederhofer, F. Glatz, M. Jilek, M. Sima, Recent progress in the superhard nanocrystalline composites: towards their industrialization and understanding of the origin of the superhardness, Surf. Coat. Technol. 108–109 (1998) 138–147. [CrossRef]
  5. S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.D. Männling, P. Nesladek, G. Dollinger, A. Bergmaier, Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with HV=80 to ≥ 105 GPa, Surf. Coat. Technol. 133–134 (2000) 152–159. [CrossRef]
  6. S. Zhang, D. Sun, Y. Fu, H. Du, Effect of sputtering target power on microstructure and mechanical properties of nanocomposite nc-TiN/a-SiNx thin films, Thin Solid Films Thin Solid Films (2004) 462–467. [CrossRef]
  7. Z.F. Zhou, B. Zhao, P.W. Shum, K.Y. Li, Mechanical behaviors of Ti-Si-N coatings deposited by bias sputtering, Rare Metal Mater. Eng. 41(S1) (2012)18–23.
  8. X. Hu, G. Li, J. Dai, Z. Ding, M. Gu, Influences of Si content and substrate temperature on Ti-Si-N nanocomposite films, Journal of Shanghai Jiaotong University 37 (2003) 252–256.
  9. L. Pan, Y. Bai, D. Zhang, J. Wang, Ti-Si-N films prepared by magnetron sputtering, Rare Metals 31 (2012) 183–188. [CrossRef]
  10. M. Diserens, J. Patscheider, F. Levy, Improving the properties of titanium nitride by incorporation of silicon, Surf. Coat. Technol. 108–109 (1998) 241–246. [CrossRef]
  11. S. Zhang, D. Sun, Y. Fu, H. Du, Q. Zhang, Effect of sputtering target power on preferred orientation in nc-TiN/a-SiNx nanocomposite thin films, Journal of Metastable and Nanocrystalline Materials 23 (2005) 175–178. [CrossRef]
  12. J. L. Zhang, Preparation and properties of metal toughened TiN/AlN nano multilayered films deposited by magnetron sputtering, M. S. thesis, Shenyang University, Shenyang, China, 2012.
  13. L. Pan, Research on nanocomposite Ti-Si-N films prepared by magnetron sputtering, M.S. thesis, Dalian University of Technology, Dalian, China, 2011.

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