Open Access
| Issue |
MATEC Web Conf.
Volume 67, 2016
International Symposium on Materials Application and Engineering (SMAE 2016)
|
|
|---|---|---|
| Article Number | 04015 | |
| Number of page(s) | 6 | |
| Section | Chapter 4 Surface Engineering and Coating Technology | |
| DOI | https://doi.org/10.1051/matecconf/20166704015 | |
| Published online | 29 July 2016 | |
- J. Musil, J. Vlcek, A perspective of magnetron sputtering in surface engineering, Surf. Coat. Technol. 112 (1999) 162–169. [CrossRef] [Google Scholar]
- G.H. Song, H. Du, C.L. He: Hard and Superhard Coatings, Beijing, Chemical Industry Press, 2007. [Google Scholar]
- S. Veprek, S. Reiprich, L. Shizhi, Superhard nanocrystalline composite materials: The TiN/Si3N4 system, Appl. Phys. Lett. 66 (1995) 2640–2642. [CrossRef] [Google Scholar]
- S. Veprek, P. Nesladek, A. Niederhofer, F. Glatz, M. Jilek, M. Sima, Recent progress in the superhard nanocrystalline composites: towards their industrialization and understanding of the origin of the superhardness, Surf. Coat. Technol. 108–109 (1998) 138–147. [CrossRef] [Google Scholar]
- S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.D. Männling, P. Nesladek, G. Dollinger, A. Bergmaier, Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with HV=80 to ≥ 105 GPa, Surf. Coat. Technol. 133–134 (2000) 152–159. [CrossRef] [Google Scholar]
- S. Zhang, D. Sun, Y. Fu, H. Du, Effect of sputtering target power on microstructure and mechanical properties of nanocomposite nc-TiN/a-SiNx thin films, Thin Solid Films Thin Solid Films (2004) 462–467. [CrossRef] [Google Scholar]
- Z.F. Zhou, B. Zhao, P.W. Shum, K.Y. Li, Mechanical behaviors of Ti-Si-N coatings deposited by bias sputtering, Rare Metal Mater. Eng. 41(S1) (2012)18–23. [Google Scholar]
- X. Hu, G. Li, J. Dai, Z. Ding, M. Gu, Influences of Si content and substrate temperature on Ti-Si-N nanocomposite films, Journal of Shanghai Jiaotong University 37 (2003) 252–256. [Google Scholar]
- L. Pan, Y. Bai, D. Zhang, J. Wang, Ti-Si-N films prepared by magnetron sputtering, Rare Metals 31 (2012) 183–188. [CrossRef] [Google Scholar]
- M. Diserens, J. Patscheider, F. Levy, Improving the properties of titanium nitride by incorporation of silicon, Surf. Coat. Technol. 108–109 (1998) 241–246. [Google Scholar]
- S. Zhang, D. Sun, Y. Fu, H. Du, Q. Zhang, Effect of sputtering target power on preferred orientation in nc-TiN/a-SiNx nanocomposite thin films, Journal of Metastable and Nanocrystalline Materials 23 (2005) 175–178. [CrossRef] [Google Scholar]
- J. L. Zhang, Preparation and properties of metal toughened TiN/AlN nano multilayered films deposited by magnetron sputtering, M. S. thesis, Shenyang University, Shenyang, China, 2012. [Google Scholar]
- L. Pan, Research on nanocomposite Ti-Si-N films prepared by magnetron sputtering, M.S. thesis, Dalian University of Technology, Dalian, China, 2011. [Google Scholar]
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