| Issue |
MATEC Web Conf.
Volume 336, 2021
2020 2nd International Conference on Computer Science Communication and Network Security (CSCNS2020)
|
|
|---|---|---|
| Article Number | 02029 | |
| Number of page(s) | 5 | |
| Section | Industrial Design and Engineering Technology | |
| DOI | https://doi.org/10.1051/matecconf/202133602029 | |
| Published online | 15 February 2021 | |
Vision based wafer states detection in front opening unified pod load-port system
1 School of Electronic Information, Jiangsu University of Science and Technology, No. 666 Changhui Road, Zhenjiang, 212003 China
2 SIASUN Robot & Automation CO., Ltd, No.33 Quanyun Road, Shenyang 110169, China
* Corresponding author: qzhang@just.edu.cn
In modern integrated circuit manufacturing processes, wafers are always transported from one procedure to another. To reduce the risk of dust, Front Opening Unified Pod (FOUP) load-port system is always adopted. Misplaced wafers should be detected before transported. Traditional methods always fail to detect wafer states correctly. To improve detection accuracy, this paper proposed a vision based method. Wafer overlap and malposition detection approach based on modified YOLO-V3 algorithm was suggested. Experiment results shows superiority of the proposed approach.
© The Authors, published by EDP Sciences, 2021
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