| Issue |
MATEC Web Conf.
Volume 192, 2018
The 4th International Conference on Engineering, Applied Sciences and Technology (ICEAST 2018) “Exploring Innovative Solutions for Smart Society”
|
|
|---|---|---|
| Article Number | 01054 | |
| Number of page(s) | 4 | |
| Section | Track 1: Industrial Engineering, Materials and Manufacturing | |
| DOI | https://doi.org/10.1051/matecconf/201819201054 | |
| Published online | 14 August 2018 | |
Surface morphology and wettability for thin films of beta-iron disilicide produced through direct-current sputtering utilizing a pair of facing targets
1
Department of Physics, Faculty of Science, King Mongkul's Institute of Technology Ladkrabang, Bangkok 10520
2
Thailand Department of Applied Science for Electronic and Materials, Kyushu University, Fukuoka 816-8580, Japan
*
Corresponding author : nathaporn_promros@kyudai.jp
In the current work, beta-FeSi2 films were epitaxially produced onto Si(111) wafer substrates via usage of facing-targets direct-current sputtering (FTDCS). The temperature for substrate heating was maintained at 600 °C and the sputtering pressure was set at 1.33 × 10-1 Pa. The surface morphology and contact angles of the beta-FeSi2 films were explored consistently in this research. Images of three-dimensional AFM and FESEM for the beta-FeSi2 film surface revealed a smooth surface with a root mean square roughness of 1.31 nm and a porous area. The average contact angle between the dropped water and beta-FeSi2 film surface was found to be 98.7°, establishing that the surface of the beta-FeSi2 films was hydrophobic. The acquired experimental results revealed the commencement of the hydrophobic surface feature of the beta-FeSi2 films produced via FTDCS approach.
© The Authors, published by EDP Sciences, 2018
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.