MATEC Web Conf.
Volume 192, 2018The 4th International Conference on Engineering, Applied Sciences and Technology (ICEAST 2018) “Exploring Innovative Solutions for Smart Society”
|Number of page(s)||4|
|Section||Track 1: Industrial Engineering, Materials and Manufacturing|
|Published online||14 August 2018|
Surface morphology and wettability for thin films of beta-iron disilicide produced through direct-current sputtering utilizing a pair of facing targets
Department of Physics, Faculty of Science, King Mongkul's Institute of Technology Ladkrabang, Bangkok 10520
2 Thailand Department of Applied Science for Electronic and Materials, Kyushu University, Fukuoka 816-8580, Japan
Corresponding author : firstname.lastname@example.org
In the current work, beta-FeSi2 films were epitaxially produced onto Si(111) wafer substrates via usage of facing-targets direct-current sputtering (FTDCS). The temperature for substrate heating was maintained at 600 °C and the sputtering pressure was set at 1.33 × 10-1 Pa. The surface morphology and contact angles of the beta-FeSi2 films were explored consistently in this research. Images of three-dimensional AFM and FESEM for the beta-FeSi2 film surface revealed a smooth surface with a root mean square roughness of 1.31 nm and a porous area. The average contact angle between the dropped water and beta-FeSi2 film surface was found to be 98.7°, establishing that the surface of the beta-FeSi2 films was hydrophobic. The acquired experimental results revealed the commencement of the hydrophobic surface feature of the beta-FeSi2 films produced via FTDCS approach.
© The Authors, published by EDP Sciences, 2018
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