MATEC Web Conf.
Volume 145, 2018NCTAM 2017 – 13th National Congress on Theoretical and Applied Mechanics
|Number of page(s)||8|
|Published online||09 January 2018|
Thermoacoustic waves in pulsed Pirani sensor MEMS. Numerical Investigation
Institute of Mechanics, Bulgarian Academy of Science, Bulgaria
* Corresponding author: firstname.lastname@example.org
The transient heat transfer process is studied in rarefied gas confined between two stationary concentric cylinders. The inner cylinder (filament) is subjected to a periodically heating-cooling cycle. The energy transfer is modeled with continuous model based on Navier-Sockes Fourier equations of motion and energy transfer and with a statistical DSMC model. Numerical results for the temperature, thermodynamic pressure and pressure difference between thermodynamic pressure and radial stress tensor component are obtained for different circular frequencies of heating cooling cycle of filament and for different filament radii. The pressure variation at the end of any local heating stage of heating-cooling cycle is close to the value of equilibrium thermodynamic pressure. The results are applicable in designing the pulsed Pirani sensors.
© The Authors, published by EDP Sciences, 2018
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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