MATEC Web Conf.
Volume 78, 20162nd International Conference on Green Design and Manufacture 2016 (IConGDM 2016)
|Number of page(s)||7|
|Published online||07 October 2016|
Comparative Study About the Structural Properties of ZnO Films Grown on Si, GaAs, And Al2O3 Substrates and a GaN Template
Department of Nanobiotronics, Hoseo University, Sechul-ri 165, Baebang-eup, Asan 336-795, Korea
* Corresponding author: firstname.lastname@example.org
We report on the structural properties of ZnO films grown on (001) Si, (001) GaAs, (0001) Al2O3 substrates and a (0001) GaN template by RF-sputtering. It is observed that all the ZnO films have textured structures with a preferred orientation of the c-axis, irrespective growth conditions, in terms of atomic-force microscope and wide-range X-ray diffractometer. However, it is found that the ZnO films in the ZnO-on-Si and ZnO-on-GaAs are consisted of various domains with different orientations, while the ZnO films in the ZnO-on-Al2O3 and ZnO-on-GaN are consisted of a single domain with the same orientation in terms of the φ-scan of X-ray diffractometer. Moreover, it is found that the ZnO-on-GaN has smaller edge dislocation density and screw dislocation density than the ZnO-on-Al2O3, which seriously depends on substrate temperature, in terms of the ω-scan of X-ray diffractometer.
© The Authors, published by EDP Sciences, 2016
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