MATEC Web of Conferences
Volume 8, 2013Progress in Ultrafast Laser Modifications of Materials
|Number of page(s)||2|
|Section||Advanced parallel processing through beam and temporal shaping|
|Published online||18 November 2013|
Parallel femtosecond laser processing with vector-wave control
Center for Optical Research and Education (CORE), Utsunomiya University, Japan
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Parallel femtosecond laser processing with a computer-generated hologram displayed on a spatial light modulator, has the advantages of high throughput and high energy-use efficiency. for further increase of the processing efficiency, we demonstrated parallel femtosecond laser processing with vector-wave control that is based on polarization control using a pair of spatial light modulators.
© Owned by the authors, published by EDP Sciences, 2013
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