| Issue |
MATEC Web of Conferences
Volume 5, 2013
REMCES XII – XIIe Rencontre Marocaine sur la Chimie de l'État Solide
|
|
|---|---|---|
| Article Number | 04041 | |
| Number of page(s) | 3 | |
| Section | Poster Communications | |
| DOI | https://doi.org/10.1051/matecconf/20130504041 | |
| Published online | 09 September 2013 | |
Microstructural characterization of CoMnFeO4 thin films deposited by radio-frequency sputtering
1 ENSA de Safi, Route Sidi Bouzid, BP. 63, 46000 Safi, Maroc
2 Institut Carnot Cirimat, 118, Route de Narbonne, 31062 Toulouse Cedex 09, France
CoMnFeO4 thin films are stable materials useful to study the influence of radio-frequency sputtering experimental conditions, on the microstructure of oxide films. From various techniques of electronic microscopy, gas adsorption techniques and ellipsometry measurements, it was shown that such oxides films prepared with 0.5 Pa sputtering argon pressure and 5 cm target–substrate distance are very dense. On the other hand, the samples obtained under higher pressure and/or longer distance, are microporous. This porosity is mainly due to shadowing and energetic effects of sputtered particles. According to different characterization techniques, a simple model is proposed to describe the microstructure of the films studied.
© Owned by the authors, published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 2.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.