MATEC Web of Conferences

Analysis of Influence of Scale Factor and Design on Performance Characteristics and Stress Strain State of Micro Sensing Element

Mikhail Kotelnikov, Aleksey Schenyatskiy and Anna Basharova

MATEC Web Conf., 346 (2021) 01043

Published online: 26 October 2021

DOI: 10.1051/matecconf/202134601043

Mikhail Kotelnikov

Aleksey Schenyatskiy

Anna Basharova

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