MATEC Web of Conferences

Modification of aluminum surfaces by supersonic plasma sputtering

Sergey Ilinykh, Anastasia Krivorigova, Nina Ilinykh, Boris Gelchinski and Leopold Leontiev

MATEC Web Conf., 329 (2020) 02027

Published online: 26 November 2020

DOI: 10.1051/matecconf/202032902027

Sergey Ilinykh

Anastasia Krivorigova

Nina Ilinykh

Boris Gelchinski

Leopold Leontiev

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