MATEC Web of Conferences

Study on polishing slurry of hydrogen peroxide-oxalic acid in CMP 304 stainless steel

Jianchun Weng, Rongchuan Lin and Xing Rong

MATEC Web Conf., 327 (2020) 02002

Published online: 06 November 2020

DOI: 10.1051/matecconf/202032702002

Jianchun Weng

Rongchuan Lin

Xing Rong

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