MATEC Web of Conferences

Numerical simulation of the oxygen distribution in silicon melt for different argon gas flow rates during Czochralski silicon crystal growth process

Zumrotul Ida, Jyh-Chen Chen and Thi Hoai Thu Nguyen

MATEC Web Conf., 204 (2018) 05013

Published online: 21 September 2018

DOI: 10.1051/matecconf/201820405013

Zumrotul Ida

Jyh-Chen Chen

Thi Hoai Thu Nguyen

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