MATEC Web of Conferences

Influence of beam radius on deposition parameters in dielectric under high energy electron irradiation

Yinghong Zuo, Yuan Wei and Jinhui Zhu

MATEC Web Conf., 189 (2018) 09001

Published online: 10 August 2018

DOI: 10.1051/matecconf/201818909001

Yinghong Zuo

Yuan Wei

Jinhui Zhu

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