MATEC Web of Conferences

Comparison Between Different Ways in Making Silicon Dioxide Layer on Silicon Wafers

Chenguang Sun, Yanjun Wang, Qiang Xu, Xuenan Zhang and Zhenfu Liu

MATEC Web Conf., 88 (2017) 01009

Published online: 09 December 2016

DOI: 10.1051/matecconf/20178801009

Chenguang Sun

Yanjun Wang

Qiang Xu

Xuenan Zhang

Zhenfu Liu

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