MATEC Web of Conferences

Narrow-aperture electron beam in the forevacuum pressure range as a tool for dimensional processing of silica glass

Aleksey Zenin, Aleksandr Klimov and Ilya Bakeev

MATEC Web Conf., 143 (2018) 03006

Published online: 08 January 2018

DOI: 10.1051/matecconf/201814303006

Aleksey Zenin

Aleksandr Klimov

Ilya Bakeev

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