MATEC Web of Conferences

Impact of environmental conditions on the reliability of MEMS components from optical applications

Marius Pustan, Corina Birleanu and Florina Serdean

MATEC Web Conf., 137 (2017) 07006

Published online: 22 November 2017

DOI: 10.1051/matecconf/201713707006

Marius Pustan

Corina Birleanu

Florina Serdean

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