MATEC Web of Conferences

Piezoelectric Response Evaluation of ZnO Thin Film Prepared by RF Magnetron Sputtering

Da-Long Cheng, Kuo-Sheng Kao, Chia-Hua Liang, Yu-Che Wang, Yu-Chieh Chen, Wei-Che Shih and Leong-Perng Chan

MATEC Web Conf., 109 (2017) 04001

Published online: 31 May 2017

DOI: 10.1051/matecconf/201710904001

Da-Long Cheng

Kuo-Sheng Kao

Chia-Hua Liang

Yu-Che Wang

Yu-Chieh Chen

Wei-Che Shih

Leong-Perng Chan

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