MATEC Web of Conferences

Bifurcations of Equilibrium Forms of NEMS/MEMS as a Sensor of Microphysical Alterations

Dmitrii Skubov, Alexey Lukin, Ivan Popov and Lev Shtukin

MATEC Web Conf., 76 (2016) 01001

Published online: 21 October 2016

DOI: 10.1051/matecconf/20167601001

Dmitrii Skubov

Alexey Lukin

Ivan Popov

Lev Shtukin

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