MATEC Web of Conferences

Effect of Nitrogen Flow Rate on Structure and Adhesion Strength of Magnetron Sputtered Ti-Si-N Nanocomposite Films

Chunlin He, Leipeng Xie, Yuechang Zhu, Rui Li, Guofeng Ma and Jianming Wang

MATEC Web Conf., 67 (2016) 04015

Published online: 29 July 2016

DOI: 10.1051/matecconf/20166704015

Chunlin He

Leipeng Xie

Yuechang Zhu

Rui Li

Guofeng Ma

Jianming Wang

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)