MATEC Web of Conferences

Closed-Loop Autofocus Scheme for Scanning Electron Microscope

Le Cui, Naresh Marturi, Eric Marchand, Sounkalo Dembélé and Nadine Piat

MATEC Web of Conferences, 32 (2015) 05003

Published online: 02 December 2015

DOI: 10.1051/matecconf/20153205003

Le Cui

Naresh Marturi

Eric Marchand

Sounkalo Dembélé

Nadine Piat

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