MATEC Web of Conferences

2D MEMS scanner integrating a position feedback

Sebastien Lani, Dara Bayat and Michel Despont

MATEC Web of Conferences, 32 (2015) 01001

Published online: 02 December 2015

DOI: 10.1051/matecconf/20153201001

Sebastien Lani

Dara Bayat

Michel Despont

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