MATEC Web of Conferences

Modeling and non-linear responses of MEMS capacitive accelerometer

C. Sri Harsha, C.S.R Prasanth and Barun Pratiher

MATEC Web of Conferences, 16 (2014) 04003

Published online: 01 September 2014

DOI: 10.1051/matecconf/20141604003

C. Sri Harsha

C.S.R Prasanth

Barun Pratiher

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