MATEC Web of Conferences

Dynamics of a Micro Electrical Mechanical System Subject to Thermoelastic and Squeeze-Film Damping

P. Belardinelli, M. Brocchini, L. Demeio and S. Lenci

MATEC Web of Conferences, 1 (2012) 04004

Published online: 09 July 2012

DOI: 10.1051/matecconf/20120104004

P. Belardinelli

M. Brocchini

L. Demeio

S. Lenci

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