MEMS acceleration sensor with remote optical readout for continuous power generator monitoringMaurizio Tormen, Branislav Timotijevic, Yves Pétremand, Markus Lützelschwab, Dara Zaman Bayat, Yvan Jacquat and Laurent AebiMATEC Web of Conferences, 32 (2015) 01003DOI: https://doi.org/10.1051/matecconf/20153201003