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Heteroepitaxial growth of SiC films by carbonization of polyimide Langmuir-Blodgett films on Si

S.I. Goloudina, V.V. Luchinin, V.M. Pasyuta, M.F. Panov, A.N. Smirnov, D.A. Kirilenko, T.F. Semenova, V.P. Sklizkova, I.V. Gofman, V.M. Svetlychnyi and V.V. Kudryavtsev

MATEC Web Conf., 98 (2017) 04002

DOI: https://doi.org/10.1051/matecconf/20179804002

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