Miniaturization of a Quasi-Servo Valve and Its Application to Positon Control of a Rubber Artificial Muscle with Built-in SensorYoshinori Moriwake, Shujiro Dohta, Tetsuya Akagi and So ShimookaMATEC Web Conf., 82 (2016) 01006DOI: https://doi.org/10.1051/matecconf/20168201006